JPH0163132U - - Google Patents
Info
- Publication number
- JPH0163132U JPH0163132U JP1987157486U JP15748687U JPH0163132U JP H0163132 U JPH0163132 U JP H0163132U JP 1987157486 U JP1987157486 U JP 1987157486U JP 15748687 U JP15748687 U JP 15748687U JP H0163132 U JPH0163132 U JP H0163132U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- ring
- sealing device
- gas
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157486U JPH0163132U (en]) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157486U JPH0163132U (en]) | 1987-10-16 | 1987-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163132U true JPH0163132U (en]) | 1989-04-24 |
Family
ID=31436972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157486U Pending JPH0163132U (en]) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163132U (en]) |
-
1987
- 1987-10-16 JP JP1987157486U patent/JPH0163132U/ja active Pending
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